Growth and applications of piezoelectric and ferroelectric thin films

Abstract

The importance of polar-axis-oriented films and epitaxial films of polar crystals in piezoelectric, pyroelectric, optical, and ferroelectric applications is emphasized. The applications of these films of polar crystals are reviewed. The recent development of an acoustooptic deflector made of ZnO thin-film optics and Si Schottky diode photodetectors integrated on a Si substrate is described. The growth of ferroelectric films by reactive magnetron sputtering and photo MOCVD and their properties related to ferroelectric memory applications are described.<>