{"title":"УСТРОЙСТВО ДЛЯ СОВМЕЩЕНИЯ МИКРОСТРУКТУР НА ДВУХ ПОДЛОЖКАХ С МИКРОМЕТРИЧЕСКОЙ ТОЧНОСТЬЮ","authors":"А. Р. Гейвандов, И. В. Касьянова","doi":"10.31857/s0032816220060075","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":210627,"journal":{"name":"Приборы и техника эксперимента","volume":"2 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Приборы и техника эксперимента","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.31857/s0032816220060075","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}