Die attachment Process Overview for High Power Semiconductors

M. Myśliwiec, R. Kisiel
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Abstract

The article reviews the most common assembly techniques: soldering, solid-liquid interdiffusion (SLID) bonding and sintering used to assemble high power semiconductors. The review of techniques has been supplemented by own research dedicated to the modification of sintering techniques based on Ag paste with a small addition of resin. The following criteria were used: adhesion and thermal properties. It was found that using a two-step pressureless sintering process: drying at 60°C for 10 min, place chip on hot paste and sintering at 175°C for 30 min, good adhesion (>10MPa) and low joint thermal resistance (less than 0.1 KW) can be achieved.
高功率半导体模具贴装工艺概述
本文综述了用于组装大功率半导体的最常见的组装技术:焊接、固液互扩散键合和烧结。在技术综述的基础上,还进行了自己的研究,致力于用少量添加树脂的银浆烧结技术的改进。使用以下标准:附着力和热性能。研究发现,采用两步无压烧结工艺:60℃干燥10 min,将薄片置于热膏上,175℃烧结30 min,可以获得良好的附着力(>10MPa)和较低的接头热阻(小于0.1 KW)。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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