Roughness determination of ultra thin multilayer coatings in cross-section images with poor SNR using edge localization

C. Brauer-Burchardt, Stephan Schroder, M. Trost, P. Kuhmstedt, A. Duparré, G. Notni
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引用次数: 1

Abstract

The interface roughness of multilayer coatings consisting of ultra thin alternating layers strongly influences the optical properties of dielectric mirrors. However, the technical possibilities for its characterization are limited. In this paper a new method for roughness determination of multilayer systems based on cross-section images is introduced. The core of the method is a new edge localization algorithm which is very robust even in the case of very low signal to noise ratio below three. Accuracy analysis is given and results are presented.
基于边缘定位的低信噪比截面图像中超薄多层涂层粗糙度测定
由超薄交变层组成的多层涂层的界面粗糙度对介质反射镜的光学性能有很大影响。然而,其表征的技术可能性是有限的。本文介绍了一种基于截面图像的多层系统粗糙度确定方法。该方法的核心是一种新的边缘定位算法,即使在极低的信噪比低于3的情况下,该算法也具有很强的鲁棒性。给出了精度分析并给出了结果。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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