{"title":"Polymer Based Hybrid Membrane-Flexure Nanomechanical Piezoresistive Sensor","authors":"G. P. Vamshi, B. S. Tina, V. Seena","doi":"10.1109/ICSENS.2018.8589806","DOIUrl":null,"url":null,"abstract":"In this paper, a novel Hybrid Membrane-Flexure Nanomechanical (HMF-NM) Piezoresistive Sensor with SU-8 as structural material and Indium Tin Oxide (ITO) as piezoresistor is designed and simulated using commercial finite element analysis (FEA) software. SU-8/ITO microcantilever has been fabricated to electromechanically extract the piezoresistive property of ITO which has been considered for simulation. The simulated device consists of a circular membrane coated with receptor layer suspended by inverse trapezoidal flexures with embedded piezoresistors. Surface stress induced on the membrane due to target binding is transduced as a uniaxial stress in the flexures which is then sensed using piezoresistors. A conventional polymer U-shaped piezoresistive cantilever is also designed and simulated for comparison. The surface stress sensitivity of HMF-NM sensor is extracted as 4.01 ppm/[mN/m] which is more than 20 times that of a conventional cantilever.","PeriodicalId":405874,"journal":{"name":"2018 IEEE SENSORS","volume":"70 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 IEEE SENSORS","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICSENS.2018.8589806","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3
Abstract
In this paper, a novel Hybrid Membrane-Flexure Nanomechanical (HMF-NM) Piezoresistive Sensor with SU-8 as structural material and Indium Tin Oxide (ITO) as piezoresistor is designed and simulated using commercial finite element analysis (FEA) software. SU-8/ITO microcantilever has been fabricated to electromechanically extract the piezoresistive property of ITO which has been considered for simulation. The simulated device consists of a circular membrane coated with receptor layer suspended by inverse trapezoidal flexures with embedded piezoresistors. Surface stress induced on the membrane due to target binding is transduced as a uniaxial stress in the flexures which is then sensed using piezoresistors. A conventional polymer U-shaped piezoresistive cantilever is also designed and simulated for comparison. The surface stress sensitivity of HMF-NM sensor is extracted as 4.01 ppm/[mN/m] which is more than 20 times that of a conventional cantilever.