Finite Element Analysis of centrally partially electroded circular AT-cut quartz plate

Abstract

This paper analyses free vibration frequencies and modes for thickness-shear and thickness-twist vibrations of centrally partially electroded circular AT-cut quartz plate by using 3-D finite element models of commercial package ANSYS. The analysis has been done with the 3-D Finite Element Analysis (FEA) for displacements and vibration frequency at the thickness-shear mode, which is important in the design of quartz crystal resonators. Trapped modes are found with vibrations mainly confined under the circular electrodes. The 3-D FEA solutions of displacement distribution can be used in the optimal selection of the structural parameters.