Process simulation of Junctionless transistor for low power applications

Altrin V. J. Sharma, D. Nirmal, Charles Pravin
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引用次数: 4

Abstract

This proposed Technique deals with the process simulation of a Junctionless transistor which will overcome the drawbacks faced by Fabrication engineers. It also compares the performance of both single gate and multigate Junctionless transistors. All existing transistors are based on the use of semiconductor junctions formed by introducing dopant atoms into the semiconductor material. As the distance between junctions in modern devices drops below 10 nm, extraordinarily high doping concentration gradients become necessary. Because of the laws of diffusion and the statistical nature of the distribution of the doping atoms, such junctions represent an increasingly difficult fabrication challenge for the semiconductor industry. Here, we propose and demonstrate a new type of transistor in which there are no junctions and no doping concentration gradients. These devices have full CMOS functionality and are made using silicon nanowires. They have near-ideal subthreshold slope, extremely low leakage currents, and less degradation of mobility with gate voltage and temperature than classical transistors. The main focus of this project work is to analyze the transistor parameters without going for real time fabrication. The parameters ideal for a good device is obtained by changing them with certain values. Using this process simulation, the errors in the device fabrication can be reduced.
低功耗无结晶体管的工艺模拟
提出的技术涉及无结晶体管的过程模拟,这将克服制造工程师面临的缺点。本文还比较了单栅和多栅无结晶体管的性能。所有现有的晶体管都是基于在半导体材料中引入掺杂原子形成的半导体结。随着现代器件中结点之间的距离下降到10nm以下,需要非常高的掺杂浓度梯度。由于扩散定律和掺杂原子分布的统计性质,这种结对半导体工业来说是一个越来越困难的制造挑战。在这里,我们提出并展示了一种新型晶体管,其中没有结,没有掺杂浓度梯度。这些器件具有完整的CMOS功能,并使用硅纳米线制成。它们具有接近理想的亚阈值斜率,极低的漏电流,并且与经典晶体管相比,迁移率随栅极电压和温度的下降较小。本项目工作的主要重点是分析晶体管参数,而不是进行实时制作。一个好装置的理想参数是用一定的值来改变它们。利用该过程模拟,可以减少器件制造过程中的误差。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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