O. Dosunmu, M. Emsley, M. Unlu, D. D. Cannon, L. Kimerling
{"title":"High speed resonant cavity enhanced Ge photodetectors on Si reflecting substrates for 1550 nm operation","authors":"O. Dosunmu, M. Emsley, M. Unlu, D. D. Cannon, L. Kimerling","doi":"10.1109/MWP.2004.1396892","DOIUrl":null,"url":null,"abstract":"We have fabricated high-speed resonant-cavity-enhanced Ge-on-SOI photodetectors, operating at 1550 nm and demonstrating a 3 dB bandwidth of 12.8 GHz. When optimized, these high-speed detectors should exhibit a quantum efficiency of 75% at 1550 nm.","PeriodicalId":137956,"journal":{"name":"2004 IEEE International Topical Meeting on Microwave Photonics (IEEE Cat. No.04EX859)","volume":"2014 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2004-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2004 IEEE International Topical Meeting on Microwave Photonics (IEEE Cat. No.04EX859)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MWP.2004.1396892","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
We have fabricated high-speed resonant-cavity-enhanced Ge-on-SOI photodetectors, operating at 1550 nm and demonstrating a 3 dB bandwidth of 12.8 GHz. When optimized, these high-speed detectors should exhibit a quantum efficiency of 75% at 1550 nm.