Optical signal distribution on silicon using a thin film photodetector array embedded in a multimode interference (MMI) coupler

Digest of the LEOS Summer Topical Meetings Biophotonics/Optical Interconnects and VLSI Photonics/WBM Microcavities, 2004. Pub Date : 2004-06-28 DOI:10.1109/LEOSST.2004.1338683

S. Cho, S. Seo, N. Jokerst

引用次数: 1

Abstract

This paper reports upon the design, fabrication, and characterization of optical signal distribution in a planar lightwave format using 1 by 4 multimode interference (MMI) couplers and arrays of thin film metal-semiconductor-metal photodetectors (MSM PDs) embedded in the output waveguides of the MMI coupler for O/E conversion.

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利用嵌入多模干涉耦合器的薄膜光电探测器阵列在硅上的光信号分布

本文报道了利用1 × 4多模干涉(MMI)耦合器和嵌入在MMI耦合器的输出波导中用于O/E转换的薄膜金属-半导体-金属光电探测器(MSM pd)阵列的平面光波格式光信号分布的设计、制造和表征。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Digest of the LEOS Summer Topical Meetings Biophotonics/Optical Interconnects and VLSI Photonics/WBM Microcavities, 2004.

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