Mathematical Model for Determining of Amplitude-Frequency Characteristics MEMS-Resonator

Abstract

A mathematical model is built to study the resonator's amplitude-frequency characteristics of the micro-beam. Nonlinear mechanics methods are used for their construction. The resulting mathematical model considers the effect of changing the elastic characteristics of the resonator micro-beam material on its amplitude and frequency of oscillations. Voigt's and Bolotin's laws determine the internal processes occurring in the micro-beam material. Based on mathematical modeling, it is established that the growth of the elastic component of the material of the resonator beam leads to an increase in the amplitude of vibrations of the beam and a decrease in the frequency of its oscillations.