Enhanced controllability in MEMS metamaterial

Abstract

In this report, we demonstrate a method to enhance the controllability of MEMS tunable metamaterial by isolating the electrical routing of alternate lines in the metamaterial unit cell array. The metamaterial consists of alternate lines of split ring resonators with two released heights. This allows for two independent tuning characteristics for a single MEMS metamaterial by selecting between the two external control ports. This technology can be further improved to provide line or pixel wise control, and can even be programmed to have one of many functionalities such as tunable filter, multicolor spatial modulator, gradient metamaterial or random metamaterial.