Increase of convertor efficiency and suppression of parasitic bipolar by means of process optimization

Vitaly Zatkovetsky, S. Levin, A. Heiman, S. Levy, D. Mistele, S. Shapira
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引用次数: 0

Abstract

Power Management Integrated Circuits (PMIC) chips contain large power switches - usually LDMOS transistors, along with low current control circuitry. During transistor switching, charge carriers are injected into the substrate and affect the surrounding devices. In junction isolated technologies, hole injection is effectively suppressed using highly doped n-type layers, while electron injection requires separating the highly doped layer from the drain of the device. However, this architecture forms a parasitic NPN transistor, which conducts the injected electrons to the isolation layer causing efficiency losses. We present here a method to improve the efficiency of the switch, by altering the semiconductor doping and thus tuning the gain of the parasitic bipolar. A clear tradeoff between gain and breakdown of the parasitic NPN is discussed.
通过工艺优化提高转化器效率,抑制寄生双极
电源管理集成电路(PMIC)芯片包含大功率开关-通常是LDMOS晶体管,以及低电流控制电路。在晶体管开关过程中,载流子被注入衬底并影响周围的器件。在结隔离技术中,使用高掺杂n型层可以有效抑制空穴注入,而电子注入需要将高掺杂层与器件的漏极分离。然而,这种结构形成了一个寄生的NPN晶体管,它将注入的电子传导到隔离层,导致效率损失。我们提出了一种通过改变半导体掺杂从而调整寄生双极增益来提高开关效率的方法。讨论了寄生NPN增益和击穿之间的明确权衡。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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