Turnkey industrial instrumentation for fast-response, on-line analysis of ppb impurities in the electronic semiconductor gases

Abstract

A totally integrated hardware and software gas analysis system, IRGAS/sup TM/, is newly available to the semiconductor process engineer to monitor the ppb quality level of the corrosive and toxic cleaning and etching gases in real-time and on-line with process tools in a fab plant. The IRGAS/sup TM/ system is based upon an industrial-ruggedized FTIR spectrometer coupled with a nickel-plated stainless-steel long-path-gas-cell containing stainless-steel mirrors coated with a heavy-layer of reflective-gold over a thick-nickel substrate for chemical corrosion resistance. An electronically-operated gas handling manifold, pumping system, and computer display package are provided within a purgeable stainless-steel enclosure for user safety protection.