K. M. Mongey, R. Brady, E. Sokell, B. Delaney, F. O’Reilly
{"title":"High Resolution Imaging of Laser Plasmas Revealing the Effects of Laser Spot Size on Plasma Emission","authors":"K. M. Mongey, R. Brady, E. Sokell, B. Delaney, F. O’Reilly","doi":"10.1109/ICOPS45751.2022.9813338","DOIUrl":null,"url":null,"abstract":"Laser plasmas can produce a high flux of soft x-ray radiation from a small volume, making them ideal for illumination for applications such as in EUV nano-lithography [1] and in cell imaging via soft x-ray tomography [2] .","PeriodicalId":175964,"journal":{"name":"2022 IEEE International Conference on Plasma Science (ICOPS)","volume":"2 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-05-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2022 IEEE International Conference on Plasma Science (ICOPS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICOPS45751.2022.9813338","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Laser plasmas can produce a high flux of soft x-ray radiation from a small volume, making them ideal for illumination for applications such as in EUV nano-lithography [1] and in cell imaging via soft x-ray tomography [2] .