Porous silicon texturing of polysilicon substrates

Conference Record of the Twenty-Eighth IEEE Photovoltaic Specialists Conference - 2000 (Cat. No.00CH37036) Pub Date : 2000-09-15 DOI:10.1109/PVSC.2000.916037

C. Striemer, F. Shi, P. Fauchet, S. Duttagupta

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引用次数: 3

Abstract

We have achieved 10.1% efficiency in a bulk porous polysilicon (PPS) solar cell in which the total thickness of the active layer was /spl sim/5 /spl mu/m. However, the removal of material from the active region of a solar cell during the etching process will limit its ultimate electrical efficiency. We have therefore started to investigate thin film PPS coatings that can be formed on the surface of a solar cell without disturbing the underlying junction characteristics. A systematic set of experiments specifically aimed at maximizing light trapping while maintaining the electrical properties of our devices is being conducted to improve our previous results. Substrates used in this investigation have included string ribbon grown polysilicon solar cells and thin film low-pressure chemical vapor deposited (LPCVD) polysilicon. The enhancement of light coupling into LPCVD polysilicon by incorporating a PPS layer has potential application in the development of thin film silicon solar cells on low cost substrates.

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多晶硅衬底的多孔硅织构

我们在活性层总厚度为/spl sim/5 /spl mu/m的体孔多晶硅(PPS)太阳能电池中实现了10.1%的效率。然而，在蚀刻过程中，从太阳能电池的有源区域去除材料将限制其最终的电效率。因此，我们已经开始研究可以在太阳能电池表面形成的薄膜PPS涂层，而不会干扰潜在的结特性。一套系统的实验，专门针对最大化光捕获，同时保持我们的设备的电性能正在进行，以改善我们以前的结果。本研究中使用的衬底包括带状生长多晶硅太阳能电池和薄膜低压化学气相沉积(LPCVD)多晶硅。通过加入PPS层来增强LPCVD多晶硅的光耦合在低成本衬底上的薄膜硅太阳能电池的开发中具有潜在的应用前景。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Conference Record of the Twenty-Eighth IEEE Photovoltaic Specialists Conference - 2000 (Cat. No.00CH37036)

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