Constructive-technological features of assembling focal plane array with elements of precision positioning

Abstract

The application of special structures and sites, which design are based on use of principles of designing on mono crystal silicon plates, allows to simplify process of assembling of focal plane arrays without deterioration of its precision characteristics. The technological methods of manufacturing of such sites provide reception of necessary structures from an initial material as plates of mono crystal silicon, which working surfaces are focused in a direction of the crystallographic axis <100>.