A New High Power Switching Transistor

K. S. Tarneja, P. Hower
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Abstract

The overall objectives of this paper is to present the development of device design and process techniques for the fabrication of high current, fast switching transistors in the range of 400-500 VCEO(SUS) range. This paper discusses how the results obtained on a 23mm device have been applied to a larger diameter (33mm) transistor. An improved base contact for equalizing the base-emitter voltage at high currents has been developed along with an improved emitter-contact preform which increases the silicon area available for current conduction. The electrical performance achieved is consistent with the theoretical optimum design. This paper describes the device design, wafer-processing techniques, and various measurements including forward SOA, DC characteristics and switching times.
一种新型大功率开关晶体管
本文的总体目标是介绍在400-500 VCEO(SUS)范围内制造大电流、快速开关晶体管的器件设计和工艺技术的发展。本文讨论了如何将在23mm器件上获得的结果应用于更大直径(33mm)的晶体管。一种用于在大电流下均衡基极-发射极电压的改进基极触点,以及一种改进的发射极-触点预制体,其增加了可用于电流传导的硅面积。所获得的电性能与理论优化设计一致。本文介绍了器件设计、晶圆处理技术和各种测量,包括前向SOA、直流特性和切换时间。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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