Piezoelectric sensor for the investigation of material surfaces

Abstract

In this paper the theoretical analysis and the results of testing of a piezoelectric sensor for the investigation of material surfaces are presented. The sensor consists of a thin piezoelectric plate (100 /spl mu/m) bonded with a thin metal (e.g. molybdenum) foil. The analytical formulae for spring constants and sensitivity of the monomorph have been established. The performed analysis permits to state the optimal parameters of the sensor dimensions, the Young modulus of applied materials. An important factor is the position of the nodal plane and its influence on sensor sensitivity. Various combinations of ceramic plates and metal foils were theoretically analysed and were applied in practical realisations of the sensors. This work was supported by the Polish Committee of the Scientific Research Grant, No PB 0503/P4/93/05.