Chien-Chung Lin, Chien-Ying Huang, Kai-Ning Ku, K. Chou, T. Chen, Po-Chih Chang, Yu-Fang Chen, Chen-Yu Lin, Chung-Chih Wang, Chi-Sen Lee, Chih-Hsiang Hsu, Shang-Chun Chen
{"title":"A Hybrid Integration Platform of Silicon Photonics","authors":"Chien-Chung Lin, Chien-Ying Huang, Kai-Ning Ku, K. Chou, T. Chen, Po-Chih Chang, Yu-Fang Chen, Chen-Yu Lin, Chung-Chih Wang, Chi-Sen Lee, Chih-Hsiang Hsu, Shang-Chun Chen","doi":"10.1109/OECC48412.2020.9273651","DOIUrl":null,"url":null,"abstract":"In this paper, we demonstrated the hybrid silicon photonics platform developed in ITRI. The functions of this platform include full-wafer high speed photonic measurement, active and passive device fabrication, and the photonic packaging technology.","PeriodicalId":433309,"journal":{"name":"2020 Opto-Electronics and Communications Conference (OECC)","volume":"61 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2020-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2020 Opto-Electronics and Communications Conference (OECC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OECC48412.2020.9273651","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
In this paper, we demonstrated the hybrid silicon photonics platform developed in ITRI. The functions of this platform include full-wafer high speed photonic measurement, active and passive device fabrication, and the photonic packaging technology.