Thin Films/Properties and Applications

E. Acosta
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引用次数: 1

Abstract

Since its discovery in early times, thin films rapidly found industrial applications such as in decorative and optics purposes. With the evolution of thin film technology, supported by the development of vacuum technology and electric power facilities, the range of applications has increased at a level that nowadays almost every industrial sector make use of them to provide specific physical and chemical properties to the surface of bulk materials. The possibility to tailor the film properties through the variation of the microstructure via the deposition parameters adopted in a specific deposition technique has permitted their entrance from the simplest like protective coatings against wear and corrosion to the most technological advanced applications such as microelectronics and biomedicine, recently. In spite of such impressive progress, the connection among all steps of the thin film production, namely deposition parameters-morphology and properties, is not fully accurate. Among other reasons, the lack of characterization techniques suitable for probing films with thickness less than a single atomic layer, along with a lack of understanding of the physics have impeded the elaboration of sophisticated models for a precise prediction of film properties. Furthermore, there remain some difficulties related to the large scale production and a relative high cost for the deposition of advanced structures, i.e. quantum wells and wires. Once these barriers are overcome, thin film technology will become more competitive for advanced technological applications.
薄膜/特性与应用
自早期发现以来,薄膜迅速在装饰和光学等方面得到了工业应用。随着薄膜技术的发展,在真空技术和电力设施发展的支持下,其应用范围已经增加到现在几乎每个工业部门都利用它们为大块材料的表面提供特定的物理和化学特性的水平。通过在特定沉积技术中采用的沉积参数,通过改变微观结构来定制薄膜性能的可能性,使其从最简单的保护涂层(如抗磨损和腐蚀)进入到最近最先进的技术应用(如微电子和生物医学)。尽管取得了如此令人印象深刻的进展,但薄膜生产的所有步骤之间的联系,即沉积参数-形貌和性能,并不完全准确。除其他原因外,缺乏适合探测厚度小于单个原子层的薄膜的表征技术,以及缺乏对物理学的理解,阻碍了精确预测薄膜性质的复杂模型的阐述。此外,大规模生产和沉积先进结构(即量子阱和量子线)的成本相对较高,仍然存在一些困难。一旦这些障碍被克服,薄膜技术将在先进技术应用中更具竞争力。
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