The control of elastic traveling waves in thin-film free structures

Abstract

A converter-display device for optoelectronic imaging is considered in this work. The image scanning is carried out by modulated elastic waves traveling on a one-dimensional matrix of microme-chanical strip waveguides [1]. Waveguides are formed by dividing a silicon membrane on parallel strips, which are attached to a supporting silicon frame by their ends. When individual excitating of all waveguides using the appropriate piezoelectric transducers, the surface of the display device will contain N ×M relief elements, where N - number of waveguides, M -number of separated bending deformations