A 0.9V 5kS/s resistor-based time-domain temperature sensor in 90nm CMOS with calibrated inaccuracy of −0.6°C/0.8°C from −40°C to 125°C

Abstract

This paper presents a new low-voltage temperature sensor which uses resistor as the sensing element and digitizes in time domain. Fabricated in 90nm CMOS, the sensor measures an inaccuracy of -0.6°C/0.8°C over -40°C~125°C range and a peak supply sensitivity of 4°C/V after two-point calibration at 25°C and 45°C. It dissipates 11.8μW at a sampling rate of 5kS/s from a 0.9V supply.