Design and test of a micro-displacement actuator based on giant magnetostrictive material

L. Shao, Dehua Yang, Bintang Yang, Kunxin Chen
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Abstract

To meet the performance requirements of co-focusing and co-phasing of segmented mirror active optics (SMAO) in modern astronomical telescope, micro-displacement actuators with nanometer resolution and millimeter stroke are necessary. The design and test of a micro-displacement actuator based on giant magnetostrictive material is present in this paper. The actuator's main components, such as giant magnetostrictive drive core, displacement pantograph mechanism and output guide mechanism, are discussed in detailed. The giant magnetostrictive drive mechanism generally may offer nanometer resolution and micron stroke. A displacement/stroke pantograph mechanism is designed with absolutely sealed flexible hydraulic structure (ASFHS) to enlarge the stroke. In addition, a secondary giant magnetostrictive drive mechanism is integrated to serve final resolution of final displacement output. In view of flexure exhibiting excellent mechanical properties free of friction, clearance and lubrication, a flexure guide mechanism with the capacity of excellent lateral load is designed to fulfill linear displacement output steadily. The sub-systems like the giant magnetostrictive drive core and displacement pantograph mechanism have been tested before integration of the whole actuator. The final test of the actuator is carried out with dual frequency laser interferometer at lab. Besides, to meet technical requirements of future extremely large telescope, further development issues mainly related to application practice of the actuator is discussed at the end.
基于超磁致伸缩材料的微位移驱动器的设计与试验
为了满足现代天文望远镜中分割镜主动光学(SMAO)共聚焦共相位的性能要求,需要纳米分辨率和毫米行程的微位移驱动器。介绍了一种基于超磁致伸缩材料的微位移作动器的设计与试验。详细讨论了超磁致伸缩驱动磁芯、位移受电弓机构和输出导向机构等作动器的主要部件。超磁致伸缩驱动机构一般可提供纳米分辨率和微米行程。设计了一种采用绝对密封柔性液压结构(ASFHS)的位移/行程受电弓机构,以扩大行程。此外,还集成了一个二级超磁致伸缩驱动机构,以满足最终位移输出的最终分辨率。针对挠性具有良好的无摩擦、无间隙、无润滑的力学性能,设计了一种具有良好横向载荷能力的挠性导向机构,以稳定地实现线性位移输出。在集成整个执行器之前,对超磁致伸缩驱动磁芯和位移受电弓机构等子系统进行了测试。最后在实验室用双频激光干涉仪对驱动器进行了测试。此外,为了满足未来超大型望远镜的技术要求,最后还讨论了主要与作动器应用实践相关的进一步发展问题。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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