Wafer-level waveguide filter realization using simplied 3D fabricaiton process

Abstract

This paper discusses a new technique to realize a wafer-level band-pass waveguide filter. The proposed waveguide takes advantage of a newly developed 3D fabrication process that enables realization of waveguide structures on wafer-level. The waveguide filter can be constructed on top of the substrate, making it independent of the substrate material. The proposed structure is suitable for millimeter-waves applications.