Development of microwave multi-magnetron equipment for modern technologies

V.N. Kopusov, N.V. Shvyrkin
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Abstract

The composition principles of technological microwave systems based on middle-power level magnetrons have been observed. Development prospects (with respect to product treatment uniformity and construction modularity) for various system types are formed and estimated, and experimental results are presented.
现代微波多磁控管设备的发展
介绍了中功率磁控管技术微波系统的组成原理。对各种系统类型的发展前景(在产品处理均匀性和施工模块化方面)进行了形成和估计,并给出了实验结果。
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