THE INFLUENCE OF THE STRUCTURAL PARAMETERS OF THE MATERIALS OF THE SENSITIVE ELEMENT OF THE OPTICAL SENSOR ON ITS SENSORY PROPERTIES

Гетманчук Віктор, Мачулянський Олександр
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Abstract

The sensor element of an optical sensor based on surface plasmon resonance is investigated in the paper. In particular, the influence of the components of the sensor element on its sensor properties by modeling design options. The Kretschmann configuration was chosen as the model, which is a glass prism with a multilayer nanoscale structure applied to one face. It was established that the material of the prism affects only the resonance angle of the structure. The thickness of nanoscale gold and silver films varied from 1 to 100 nm. The minimum value of the coefficient was obtained when the thickness of the gold and silver nanoscale films was 50 nm and 45 nm, respectively. The thickness of the silicon dioxide film varied from 10 to 150 nm. In the Au – SiO2 structure, the addition of silicon dioxide improved the optical properties of the multilayer structure. The minimum value of the reflection coefficient has decreased, but the thickness of the silicon dioxide is 3 nm. When the thickness of the dielectric layer increases, the optical properties of the structure deteriorate. The structure of the sensitive element, which uses a nanosized silver film, almost does not change its optical properties when adding a layer of SiO2, its thickness can reach 50 nm.
光学传感器敏感元件材料的结构参数对其传感性能的影响
研究了一种基于表面等离子体共振的光学传感器的传感元件。特别是,通过建模设计选项,传感器元件的组件对其传感器特性的影响。选择Kretschmann结构作为模型,即多层纳米结构的玻璃棱镜。确定了棱镜的材料只影响结构的共振角。纳米级金、银薄膜的厚度从1 ~ 100 nm不等。该系数在金、银纳米膜厚度分别为50 nm和45 nm时达到最小值。二氧化硅薄膜的厚度在10 ~ 150nm之间变化。在Au - SiO2结构中,二氧化硅的加入改善了多层结构的光学性能。反射系数的最小值有所减小,但二氧化硅的厚度仍为3 nm。当介质层厚度增加时,结构的光学性能变差。该敏感元件的结构采用纳米级银膜,当添加一层SiO2时几乎不改变其光学性能,其厚度可达50 nm。
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