Modeling, Design, and Verification for the Analog Front-end of a MEMS-based Parallel Scanning-probe Storage Device

IEEE Custom Integrated Circuits Conference 2006 Pub Date : 2006-09-01 DOI:10.1109/CICC.2006.320886

C. Hagleitner, A. R. Bonaccio, H. Rothuizen, D. Wiesmann, J. Lienemann, J. Korvink, G. Cherubini, E. Eleftheriou

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引用次数: 4

Abstract

The paper presents an integrated analog front-end (AFE) for the read-channel of a parallel scanning-probe storage device. The read/write element is based on an array of microfabricated silicon cantilevers equipped with heating elements to form nanometer-sized indentations in a polymer surface using integral atomic-force microscopy (AFM) tips. A detailed model based on a combination of a thermal/electrical lumped-element model and behavioral model of the electrostatic/mechanical part was developed. The behavioral model of the electrostatic/mechanical part is automatically generated from a full finite-element model (FEM). The model is completely implemented in Verilog-A and was used to co-develop the integrated analog front-end circuitry together with the read/write cantilever. The model and the analog front-end were simulated together and the results were experimentally verified. The approach chosen is well suited for system-level simulation and verification/extraction in a design environment based on standard EDA tools

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基于mems的并行扫描探针存储设备模拟前端的建模、设计和验证

介绍了一种用于并行扫描探针存储装置读通道的集成模拟前端(AFE)。读/写元件是基于一组微制造的硅悬臂，配有加热元件，使用积分原子力显微镜(AFM)尖端在聚合物表面形成纳米尺寸的凹痕。建立了基于热/电集总单元模型和静电/机械部分行为模型相结合的详细模型。静电/机械部件的行为模型是由全有限元模型自动生成的。该模型在Verilog-A中完全实现，并用于与读写悬臂一起共同开发集成模拟前端电路。对模型和模拟前端进行了综合仿真，并对仿真结果进行了实验验证。所选择的方法非常适合在基于标准EDA工具的设计环境中进行系统级仿真和验证/提取

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IEEE Custom Integrated Circuits Conference 2006

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