Reliable characterization of materials and nanostructured systems <<50nm using coherent EUV beams

J. Hernández-Charpak, T. Frazer, J. Knobloch, K. Hoogeboom-Pot, D. Nardi, W. Chao, Lei Jiang, M. Tripp, S. King, H. Kapteyn, M. Murnane
{"title":"Reliable characterization of materials and nanostructured systems <<50nm using coherent EUV beams","authors":"J. Hernández-Charpak, T. Frazer, J. Knobloch, K. Hoogeboom-Pot, D. Nardi, W. Chao, Lei Jiang, M. Tripp, S. King, H. Kapteyn, M. Murnane","doi":"10.1117/12.2219434","DOIUrl":null,"url":null,"abstract":"Coherent extreme ultraviolet beams from tabletop high harmonic generation offer revolutionary capabilities for observing nanoscale systems on their intrinsic length and time scales. By launching and monitoring acoustic waves in such systems, we fully characterize sub-10nm films and find that the Poisson’s ratio of low-k dielectric materials does not stay constant as often assumed, but increases when bond coordination is bellow a critical value. Within the same measurement, by following the heat dissipation dynamics from nano-gratings of width 20-1000nm and different periodicities, we confirm the effects of the newly identified collectively-diffusive regime, where close-spaced nanowires cool faster than widely-spaced ones.","PeriodicalId":193904,"journal":{"name":"SPIE Advanced Lithography","volume":"4 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-04-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"SPIE Advanced Lithography","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2219434","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1

Abstract

Coherent extreme ultraviolet beams from tabletop high harmonic generation offer revolutionary capabilities for observing nanoscale systems on their intrinsic length and time scales. By launching and monitoring acoustic waves in such systems, we fully characterize sub-10nm films and find that the Poisson’s ratio of low-k dielectric materials does not stay constant as often assumed, but increases when bond coordination is bellow a critical value. Within the same measurement, by following the heat dissipation dynamics from nano-gratings of width 20-1000nm and different periodicities, we confirm the effects of the newly identified collectively-diffusive regime, where close-spaced nanowires cool faster than widely-spaced ones.
利用相干超紫外光束可靠表征 <<50nm 的材料和纳米结构系统
桌面高谐波产生的相干极紫外光束为观察纳米级系统的固有长度和时间尺度提供了革命性的能力。通过在这样的系统中发射和监测声波,我们充分表征了10nm以下的薄膜,并发现低k介电材料的泊松比并不像通常假设的那样保持恒定,而是在键配位低于临界值时增加。在相同的测量中,通过跟踪宽度为20-1000nm和不同周期的纳米光栅的散热动力学,我们证实了新发现的集体扩散机制的影响,其中紧密间隔的纳米线比宽间隔的纳米线冷却得更快。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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