Grating light valve based on high reflectance micro-beams: Design by simulation

Abstract

In this paper are presented the results of grating light valve (GLV) structure simulation using Coventorware software in order to maximize the intensity of diffracted light in the ±1 diffraction orders. Was simulated a GLV element which consists from 6 high reflective micro-beams suspended above a silicon substrate and which are ellectrostatically actuated. By simulation are optimized the length, width and thicknesses of the micro-beam and the space between micro-beams to obtaining a deflection of »/4 at moderate value of applied voltage.