Modeling and simulation analysis of pressure-sensing characteristics for piezoresistive pressure sensor based on graphene/hexagonal boron nitride heterostructures

2017 Prognostics and System Health Management Conference (PHM-Harbin) Pub Date : 2017-07-01 DOI:10.1109/PHM.2017.8079174

Zhongzheng Fang, Yong Zhang, J. Qiu, Guanjun Liu

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引用次数: 3

Abstract

Small and high-precision piezoresistive pressure sensor based on graphene/hexagonal boron nitride (h-BN) heterostructures can be embedded in aircraft airborne equipment, allowing for potential application involving fault diagnosis, prognostics and health management. In this paper, the pressure-sensing characteristics of graphene/h-BN heterostructures membrane — the relationship between pressure and strain were studied by finite element modeling and simulation method. On the one hand, the pressure-sensing characteristics models of circular, rectangular and square graphene/h-BN heterostructures membrane were established by finite element simulation software COMSOL. On the other hand, h-BN/graphene/h-BN heterostructures and monolayer graphene also have been selected for comparative analysis. The above results provide an effective quantitative guidance for the structure and performance designing of piezoresistive pressure sensors based on graphene/h-BN heterostructures.

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石墨烯/六方氮化硼异质结构压阻式压力传感器的压敏特性建模与仿真分析

基于石墨烯/六方氮化硼(h-BN)异质结构的小型高精度压阻式压力传感器可嵌入飞机机载设备，可用于故障诊断、预测和健康管理等潜在应用。本文采用有限元建模和仿真的方法研究了石墨烯/h-BN异质结构膜的压敏特性——压力与应变的关系。一方面，利用有限元仿真软件COMSOL建立了圆形、矩形和方形石墨烯/h-BN异质结构膜的压敏特性模型;另一方面，还选择了h-BN/石墨烯/h-BN异质结构和单层石墨烯进行对比分析。上述结果为基于石墨烯/h-BN异质结构的压阻式压力传感器的结构和性能设计提供了有效的定量指导。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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2017 Prognostics and System Health Management Conference (PHM-Harbin)

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