Lin Pang, Bo Chen, Lurong Guo, H. Zeng, Weijian Tian
{"title":"Polymerized-film replication of micro-optics elements","authors":"Lin Pang, Bo Chen, Lurong Guo, H. Zeng, Weijian Tian","doi":"10.1117/12.300709","DOIUrl":null,"url":null,"abstract":"A new method for replicating microstructure elements is presented. The principle and technological process of the method are introduced. For one polymer, deep binary relief grating on quartz substrate is replicated by using this new method and the relief-transfer efficiency and transparency are measured. The results show that the replicas are of high fidelity of profile and are suitable for practical applications.","PeriodicalId":362287,"journal":{"name":"Thin Film Physics and Applications","volume":"400 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1998-02-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Thin Film Physics and Applications","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.300709","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
A new method for replicating microstructure elements is presented. The principle and technological process of the method are introduced. For one polymer, deep binary relief grating on quartz substrate is replicated by using this new method and the relief-transfer efficiency and transparency are measured. The results show that the replicas are of high fidelity of profile and are suitable for practical applications.