Polymerized-film replication of micro-optics elements

Lin Pang, Bo Chen, Lurong Guo, H. Zeng, Weijian Tian
{"title":"Polymerized-film replication of micro-optics elements","authors":"Lin Pang, Bo Chen, Lurong Guo, H. Zeng, Weijian Tian","doi":"10.1117/12.300709","DOIUrl":null,"url":null,"abstract":"A new method for replicating microstructure elements is presented. The principle and technological process of the method are introduced. For one polymer, deep binary relief grating on quartz substrate is replicated by using this new method and the relief-transfer efficiency and transparency are measured. The results show that the replicas are of high fidelity of profile and are suitable for practical applications.","PeriodicalId":362287,"journal":{"name":"Thin Film Physics and Applications","volume":"400 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1998-02-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Thin Film Physics and Applications","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.300709","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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Abstract

A new method for replicating microstructure elements is presented. The principle and technological process of the method are introduced. For one polymer, deep binary relief grating on quartz substrate is replicated by using this new method and the relief-transfer efficiency and transparency are measured. The results show that the replicas are of high fidelity of profile and are suitable for practical applications.
微光学元件的聚合膜复制
提出了一种复制微结构元素的新方法。介绍了该方法的原理和工艺流程。用该方法在石英衬底上复制了一种聚合物的深二元浮雕光栅,并测量了浮雕传递效率和透明度。结果表明,该模型具有较高的轮廓保真度,适合实际应用。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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