TWT Support Road Coating by MPCVD

2017 IEEE International Conference on Plasma Science (ICOPS) Pub Date : 2017-05-21 DOI:10.1109/PLASMA.2017.8496187

F. Bozduman, Necati Haytural, A. Gulec, O. N. Asan, L. Oksuz

引用次数: 0

Abstract

Dielectric support rods such as alumina, quartz, BeO and diamond have been spaced around the helix to hold the helix in place and also to remove heat from helix. Interaction efficiency of TWT also depends on these support rod's shape and material among the other parameters 1. For this purpose an homemade MPCVD 2 microwave plasma chemical vapor deposition) system has been built. The plasma characteristics and surface morphology of the rods and thermal analysis of the samples will be given.

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用MPCVD制造的行波管支撑路面涂层

电介质支撑棒，如氧化铝，石英，BeO和金刚石已经在螺旋周围隔开，以保持螺旋的位置，也从螺旋中去除热量。行波管的相互作用效率还取决于支撑杆的形状和材料等参数。为此，建立了自制的微波等离子体化学气相沉积(MPCVD)系统。给出了棒的等离子体特性和表面形貌以及样品的热分析。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2017 IEEE International Conference on Plasma Science (ICOPS)

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