{"title":"Nano-imprint-lithography for very thin optical parts on large area","authors":"Janine Brommert, Markus Rawert, T. Ruhl","doi":"10.1117/12.2647826","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":272550,"journal":{"name":"MOEMS and Miniaturized Systems XXII","volume":"92 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2023-03-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"MOEMS and Miniaturized Systems XXII","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2647826","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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