Piezoelectric Micromachined Ultrasonic Transducers based on PZT films

2006 15th ieee international symposium on the applications of ferroelectrics Pub Date : 2006-07-01 DOI:10.1109/ISAF.2006.4387898

B. Belgacem, F. Calame, P. Muralt

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引用次数: 14

Abstract

Piezoelectric micro machined ultrasonic transducers (pMUT) are piezoelectric laminated plates operating at flexural modes. The pMUT's fabricated in this work contained a 4 mum thick lead zirconate titanate (PZT) thin film deposited by a sol-gel technique, and exhibiting a permittivity of epsiv_r=1200, and an effective transverse piezoelectric coefficient e_31.f of 12 C/m². A further optimization of the sol-gel process yielded larger grain diameters and consequently improved properties: epsiv_r=1600, e_31.f of 16 C/m². A design and micromachining concpet for easy scaling in frequency has been developed. The electromechanical coupling coefficient (k²) and the quality factor (Q) of rectangular clamped elements (with former PZT process) were measured as k²=4.4% and Q=145 in air for a low frequency transducer (@240 kHz). The 16.9 MHz transducer yielded values of Q=25 and k² =3% in air. The effect of DC bias voltage on frequency and k² has been studied.

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基于PZT薄膜的压电微机械超声换能器

压电微机械超声换能器(pMUT)是一种工作在弯曲模式下的压电层合板。采用溶胶-凝胶法制备的pMUT包含4 μ m厚的锆钛酸铅(PZT)薄膜，其介电常数epsivr=1200，有效横向压电系数e31。f (12c /m2)溶胶-凝胶工艺的进一步优化产生了更大的颗粒直径，从而改善了性能:epsivr=1600, e31。f (16c /m2)提出了一种易于缩放频率的设计和微加工概念。对低频换能器(@240 kHz)在空气中的机电耦合系数(k2)和品质因子(Q)(采用原PZT工艺)分别为k2=4.4%和Q=145。16.9 MHz换能器在空气中产生Q=25和k2 =3%的值。研究了直流偏置电压对频率和k2的影响。

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2006 15th ieee international symposium on the applications of ferroelectrics

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