Tubular micro- and nano- sensors and actuators for aerodynamics

Abstract

New data on the fabrication and study of semiconductor micro- and nanotubes, and also on the application of such micro- and nanotubes as basic elements in sensors and actuators are reported. Fabrication methods for tubular micro- and nanosensors and actuators are described, and examples of fabricated devices are presented. The potential offered by the fabricated pilot devices in aerodynamic applications is demonstrated.