Love wave delay line devices with tenable temperature characteristics using SU-8 photoresist as guiding layer

Abstract

Temperature characteristics of SU-8 photoresist coated love wave devices are presented from 0 °C to 120 °C. Surface skimming bulk wave (SSBW) and love wave delay line devices were fabricated on the ST-90°X quartz substrate. Effects of SU-8 thickness on insertion loss and temperature range of near-zero temperature coefficient of frequency (TCF) are investigated. Love wave devices with -15.5dB to -22.4dB insertion loss and near zero TCF from 60 °C to 100°C are demonstrated in the 150MHz range.