Design of series RF MEMS switches suitable for reconfigurable antenna applications

Abstract

In this paper, RF MEMS switches are designed and simulated for applications in reconfigurable antennas. RF MEMS switches are replacing the traditional semiconductor switches such as FET and PIN diodes which were used with antennas for reconfiguration. The Coventorware software (FEM) is used for the simulation of the RF MEMS switch. The configuration of the different RF MEMS switches are analyzed. Using this software the optimization of the design of the switches are performed for minimum pull in voltage. The pull in voltage for the proposed designs is compared. This paper presents series RF MEMS switches that have a metal contact which ensures its operation from DC to 12 GHz. The switches are fabricated on a Silicon substrate. The designs are simulated for same dimension of the membrane.