A microactuator for magnetic field control device with large shifting range

Abstract

A large tilting angle and zero static power consumption microactuator has been designed and fabricated in order to meet the requirement of low power consumption and remotely control systems. Analytical model and fabrication process flow of rotation actuator have been demonstrated, and static performance has been tested and compared to theoretical data. The results show the performance of our electrostatic driven device in good agreement with theoretical predicted model.