SAW dispersive equivalent circuit modeling for diamond layered structures

Abstract

A dispersive equivalent circuit (DEC) model including velocity dispersion of layered structures based on Smith's equivalent circuit model is presented. Assuming the velocity dispersion is very small near the center frequency, the impedance term of Smith's equivalent circuit has been separated. The modified equivalent circuit is given by an extension of the original Smith's equivalent circuit model by cascading a velocity dispersion impedance term to the acoustic port and parallel to the longitudinal port. The frequency response of ZnO/diamond/Si layered structures, including velocity dispersion is calculated in the case of the modified equivalent circuit model and compared with the equivalent circuit including the velocity dispersion directly within the model parameters.