Texture Analysis

Abstract

Chip manufacturing company moves from Al interconnects into Cu-based technology. Now the task is to establish proper conditions for the Cu film growth on Si. Number of samples, Cu on Si(001), were grown at different temperatures and using different Cu growth rates. You were given one of the many samples, Cu on Si(001). Your assignment consists in: 1) determining a preferred orientation along c-axis (preferred out-ofplane orientation) of Cu film and 2) determining the in-plane orientation of the layer with respect to the Si substrate.