Calculation of the dynamic characteristics of micro-mirror element based on thermal micro-actuators

SPIE Micro + Nano Materials, Devices, and Applications Pub Date : 2015-12-22 DOI:10.1117/12.2202444

S. Evstafyev, S. Timoshenkov, Vyacheslav K. Samoilykov, N. Korobova, A. Timoshenkov, Anatolij M. Tereshhenko

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Abstract

Paper presents a structure of a micro-mirror element driven by thermal micro-actuators. Micro-mirror dimensions are 100x100 um and it was manufactured by a surface micromachining using microelectronics technologies. Thermal microactuator is a bimorph structure consisting of aluminum and silicon dioxide layers with a polysilicon heater between them. The description of manufacturing process for micro-mirror element is given. The micro-mirror motion is achieved by passing an electric current through the heater. The actuator structure is heated and rotates the mirror. The processes of heating and cooling of thermal micro-actuator structure directly affects the characteristics of manufactured micro-mirror, thus the studying of these processes is essential. The report proposes a method for calculating the heating and cooling time, taking into account the influence of the structure geometry, electrical characteristics of external influence and the environment conditions. Also a method for the experimental determination of the dynamic characteristics is proposed, along with the method of electro-thermal analogy. The results of calculation are in good agreement with the experimental data, which allows one to use it to determine the dynamic characteristics of micro-devices based on thermal microactuators.

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基于热致动器的微镜元件动态特性计算

本文介绍了一种由热微致动器驱动的微镜元件的结构。微镜尺寸为100x100um，采用微电子技术进行表面微加工。热微致动器是由铝层和二氧化硅层组成的双晶片结构，两者之间有多晶硅加热器。介绍了微镜元件的制造工艺。微镜的运动是通过通过加热器的电流来实现的。致动器结构加热并旋转镜面。热微执行器结构的加热和冷却过程直接影响微镜的性能，因此对这些过程的研究至关重要。该报告提出了一种计算加热和冷却时间的方法，考虑了结构几何形状、外部影响的电气特性和环境条件的影响。并提出了一种实验测定其动态特性的方法，以及电热类比法。计算结果与实验数据吻合较好，可以用来确定基于热致动器的微器件的动态特性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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SPIE Micro + Nano Materials, Devices, and Applications

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