A Dynamic Path Planning Algorithm with Application to AFM Tip Steering

Abstract

A computer-controlled ultrasonic cleaning system (10) that is designed to clean various articles ranging from integrated-circuit silicone wafers and hard disk platters to small mechanical components. The system (10) utilizes an electronic system which operates in combination with a computer (12) and software (14) to activate a plurality of crystal transducers (32). The crystal transducers (32), which are located on the lower surface of a cleaning tank (40) convert electrical energy, supplied by the electronic system, to acoustic/mechanical energy with a conversion efficiency near 80 percent. The system software includes a program that automatically calibrates the system and corrects crystal-to-crystal deficiencies to maintain the system (10) in a peak operating condition.