Multilayer Giant Magneto-Impedance sensor for low field sensing

Abstract

In this paper, several Giant Magneto Impedance (GMI) magnetic sensors have been designed, fabricated, post processed and tested to work in low field intensities (miliTesla range). The sensors are multilayer GMI sensors having CoSiB as GMI material surrounded with two thinner gold layers. The conventional thin film microfabrication process is employed to fabricate the sensors on a glass wafer. A post-processing thermal and magnetic treatment is suggested to magnetize GMI material and enhance performance of the sensors. The suggested post-processing step will decrease fabrication cost of GMI sensors and improve their performance effectively.