Optimal design of a novel 2-DOF compliant parallel micromanipulator for nanomanipulation

Abstract

A new two-degrees-of-freedom (2-DOF) compliant parallel micromanipulator (CPM) utilizing flexure joints has been proposed for two-dimensional (2-D) nanomanipulation in this paper. The system is developed by a careful design and proper selection of electrical and mechanical components. Based upon the developed PRB model, both the position and velocity kinematic modelings have been performed in details, and the CPM's workspace area is determined analytically in view of the physical constraints imposed by pizeo-actuators and flexure hinges. Moreover, in order to achieve a maximum workspace subjected to the given dexterity indices, kinematic optimization of the design parameters has been carried out, which leads to a manipulator satisfying the requirement of this work. Simulation results reveal that the designed CPM can perform a high dexterous manipulation within its workspace.