Mask Layout design of single- and double-arm electrothermal microactuators

A. Holovatyy, V. Teslyuk, M. Lobur, M. Szermer, C. Maj
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引用次数: 2

Abstract

In this paper, the mask layouts of the single- and double-arm electrothermal microactutors have been designed using the CleWin layout editor. The designed masks will be used for the development of training materials for a course on MEMS fabrication within the framework of the EduMEMS project.
单臂和双臂电热微执行器的掩模布局设计
本文利用CleWin布局编辑器设计了单臂和双臂电热微致动器的掩模布局。设计的口罩将用于在EduMEMS项目框架内开发MEMS制造课程的培训材料。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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