Fuzzy fault tree analysis of mask stage

Abstract

Fault tree analysis (FTA) is a top-down approach for failure analysis, starting with a potential undesirable event called a TOP event, and then determining all the ways it can happen. FTA is the most commonly used technique for causal analysis in risk and reliability studies. Mask stage an important part of lithography. In this paper, Fault Tree of the mask stage is built with “Mask stage doesn't work” as the top event. Quantitative assessment and qualitative analysis based on Fuzzy Logic are carried out. And the importance of bottom events is calculated.