Isolated, high voltage arbirtary pulse generator

K. Miller, T. Ziemba, J. Prager, I. Slobodov, J. Picard
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Abstract

Eagle Harbor Technologies, Inc. has developed an Arbitrary Pulse Generator (APG) with isolated high voltage output. The EHT APG can produce output pulses with voltages up to 10 kV and fast rise time (100 ns) at high pulse repetition frequency (up to 100 kHz) with a user-adjustable duty cycle from 0-100%. The isolated output allows the pulse generator to be connected to loads that need to be biased. These pulser generators utilize modern silicon carbide (SiC) MOSFETs, which offer lower switching and conduction losses while allowing for higher switching frequency capabilities compared to IGBTs. This pulse generator has applications for RF plasma heating; inductive and arc plasma sources; magnetron driving; and generation of arbitrary pulses at high voltage, high current, and high pulse repetition frequency in the semiconductor processing, non-equilibrium plasma source, and material processing communities.
隔离式高压任意脉冲发生器
Eagle Harbor技术公司开发了一种具有隔离高压输出的任意脉冲发生器(APG)。EHT APG可以产生电压高达10 kV的输出脉冲,在高脉冲重复频率(高达100 kHz)下快速上升时间(100 ns),用户可调占空比从0-100%。隔离输出允许脉冲发生器连接到需要偏置的负载。这些脉冲发生器利用现代碳化硅(SiC) mosfet,与igbt相比,提供更低的开关和传导损耗,同时允许更高的开关频率能力。该脉冲发生器适用于射频等离子体加热;感应和电弧等离子体源;磁控管驾驶;以及在半导体加工、非平衡等离子体源和材料加工领域中产生高压、大电流和高脉冲重复频率的任意脉冲。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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