{"title":"InAs/Al0.4Ga0.6Sb side gated vertical TFET on GaAs substrate","authors":"V. Chinni, M. Zaknoune, X. Wallart, L. Desplanque","doi":"10.1109/ICIPRM.2016.7528571","DOIUrl":null,"url":null,"abstract":"Summary form only given. We report on the fabrication of a side gated vertical tunnel field effect transistor (TFET) with a 570 μA/μm ON current at V<sub>ds</sub>=V<sub>gs</sub>=0.5 V. The device is based on a near broken gap AlGaSb/InAs heterostructure grown on a GaAs substrate thanks to a GaSb accommodation layer. The electrostatic control of the 80 nm InAs channel is obtained by lateral side gates. The trade-off between mesa width and I<sub>ON</sub>/I<sub>OFF</sub> ratio is evidenced.","PeriodicalId":357009,"journal":{"name":"2016 Compound Semiconductor Week (CSW) [Includes 28th International Conference on Indium Phosphide & Related Materials (IPRM) & 43rd International Symposium on Compound Semiconductors (ISCS)","volume":"96 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-06-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2016 Compound Semiconductor Week (CSW) [Includes 28th International Conference on Indium Phosphide & Related Materials (IPRM) & 43rd International Symposium on Compound Semiconductors (ISCS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICIPRM.2016.7528571","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Summary form only given. We report on the fabrication of a side gated vertical tunnel field effect transistor (TFET) with a 570 μA/μm ON current at Vds=Vgs=0.5 V. The device is based on a near broken gap AlGaSb/InAs heterostructure grown on a GaAs substrate thanks to a GaSb accommodation layer. The electrostatic control of the 80 nm InAs channel is obtained by lateral side gates. The trade-off between mesa width and ION/IOFF ratio is evidenced.