InAs/Al0.4Ga0.6Sb side gated vertical TFET on GaAs substrate

V. Chinni, M. Zaknoune, X. Wallart, L. Desplanque
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Abstract

Summary form only given. We report on the fabrication of a side gated vertical tunnel field effect transistor (TFET) with a 570 μA/μm ON current at Vds=Vgs=0.5 V. The device is based on a near broken gap AlGaSb/InAs heterostructure grown on a GaAs substrate thanks to a GaSb accommodation layer. The electrostatic control of the 80 nm InAs channel is obtained by lateral side gates. The trade-off between mesa width and ION/IOFF ratio is evidenced.
GaAs衬底上的InAs/Al0.4Ga0.6Sb侧门控垂直TFET
只提供摘要形式。在Vds=Vgs=0.5 V的条件下,制备了一种电流为570 μA/μm的侧门控垂直隧道场效应晶体管(TFET)。该器件基于在GaAs衬底上生长的近断隙AlGaSb/InAs异质结构,这要归功于GaSb调节层。80 nm的InAs通道的静电控制是通过侧面栅极实现的。证明了台面宽度和离子/IOFF比之间的权衡。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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