Features Implementation on Balancing Process in Manufacture of Ring Microgyroscope Sensing Element

Abstract

The design of the sensing element (SE) of a ring micromechanical gyroscope is presented. Features of the technological process of its balancing by means of laser punching holes in adjacent segments of the ring are considered. It is established that during its conduction, the energy and duration of the laser pulse must be selected in such a way that silicon drops do not fall on the structural elements of the SE ring.