Nitride-based HFETs with carrier confinement layers

Abstract

Nitride-based Al/sub 0.24/Ga/sub 0.76/N/GaN heterostructure field effect transistors (HFETs) with carrier confinement layers were fabricated. The results found that the enhanced 2 dimensional electron gas (2DEG) carrier mobility from 1070 to 1180 cm/sup 2/V/sup -1/sec/sup -1/ by the insertion of a Mg-doped semi-insulating carrier confinement layer with a Cp/sub 2/Mg flow rate of 2.36/spl times/10/sup -8/ mole/min and smoother sample surface. The DC and RF characteristics of these HFETs were also good.